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 Positive Type Photoresist Developer - SD-1/SD-W - |
| ITEM(SD-1) |
Unit |
Specified value |
Analysis Method |
| Assay((CH3)4N.OH) |
Wt% |
2.37±0.005 |
Potentiometric Titrator |
| Color |
Hazen |
<5 |
JIS-K 8001 |
| Carbonate(CO32-) |
ppm |
<10 |
Ion Chromatography |
| Mrthanol(CH3OH) |
ppm |
<10 |
Gas Chromatography |
| ITEM(SD-1 & SD-W) |
Unit |
Specified value |
Analysis Method |
| Chloride(Cl) |
ppb |
<10 |
Ion Chromatography |
| Aluminum(Al) |
ppb |
<1 |
ICP-MS |
| Barium(Ba) |
ppb |
<1 |
ICP-MS |
| Calcium(Ca) |
ppb |
<3 |
ICP-MS |
| Cadmium(Cd) |
ppb |
<1 |
ICP-MS |
| Chromium(Cr) |
ppb |
<1 |
ICP-MS |
| Copper(Cu) |
ppb |
<1 |
ICP-MS |
| Iron(Fe) |
ppb |
<3 |
ICP-MS |
| Lead(Pb) |
ppb |
<1 |
ICP-MS |
| Lithium(Li) |
ppb |
<1 |
ICP-MS |
| Magnesium(Mg) |
ppb |
<1 |
ICP-MS |
| Manganese(Mn) |
ppb |
<1 |
ICP-MS |
| Nickel(Ni) |
ppb |
<1 |
ICP-MS |
| Potassium(K) |
ppb |
<1 |
ICP-MS |
| Silver(Ag) |
ppb |
<1 |
ICP-MS |
| Sodium(Na) |
ppb |
<3 |
ICP-MS |
| Zinc(Zn) |
ppb |
<1 |
ICP-MS |
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